METHOD FOR HEATING A CLAMP,申请号KR20077019006-传众专利搜索

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发明名称	METHOD FOR HEATING A CLAMP
摘要
申请公布号	KR100788056(B1)	申请公布日期	2007.12.21
申请号	KR20077019006	申请日期	2007.08.20
申请人		发明人
分类号	C23C14/50;H01L21/324;C23C16/458;C23C16/46;H01L21/00;H01L21/02;H01L21/205;H01L21/68;H01L21/683;H01L21/687	主分类号	C23C14/50
代理机构		代理人
主权项
地址

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