摘要 |
In one aspect, the present invention is directed to a resonator architecture including a plurality of in-plane vibration microelectromechanical resonators (for example, 2 or 4 resonators) that are mechanically coupled to provide, for example, a differential signal output. In one embodiment, the present invention includes four commonly shaped microelectromechanical tuning fork resonators (12, 14, 16, 18) (for example, tuning fork resonators having two or more rectangular-shaped or square-shaped tines). Each resonator is mechanically coupled to another resonator of the architecture. For example, each resonator of the architecture is mechanically coupled to another one of the resonators on one side or a corner of one of the sides. In this way, all of the resonators, when induced, vibrate at the same frequency. |
申请人 |
ROBERT BOSCH GMBH;THE BOARD OF TRUSTEES OF THE LELAND STANFORD JUNIOR UNIVERSITY;PAN, ZHIYU;CHANDLER, ROB, NORRIS;LUTZ, MARKUS;PARTRIDGE, AARON;MATERNA, VOLKER;YAMA, GARY;FREY, WILHELM |
发明人 |
PAN, ZHIYU;CHANDLER, ROB, NORRIS;LUTZ, MARKUS;PARTRIDGE, AARON;MATERNA, VOLKER;YAMA, GARY;FREY, WILHELM |