A PROCESS FOR DEPOSITING A LOW DIELECTRIC CONSTANT FILM,申请号KR20000034509-传众专利搜索

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发明名称	A PROCESS FOR DEPOSITING A LOW DIELECTRIC CONSTANT FILM
摘要
申请公布号	KR100787657(B1)	申请公布日期	2007.12.21
申请号	KR20000034509	申请日期	2000.06.22
申请人		发明人
分类号	C23C16/42;H01L21/316;C23C16/40;H01L21/31;H01L21/3105;H01L21/312;H01L21/314;H01L21/768;H01L23/522	主分类号	C23C16/42
代理机构		代理人
主权项
地址

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