ARRAY ULTRASONIC PROBE AND ITS MANUFACTURING METHOD AND ARRAY ULTRASONIC PROBE DRIVE METHOD

摘要

An array ultrasonic wave probe of multichannel type arranged at least linearly is characterized in that it comprises sheet-shaped piezoelectric elements as composite piezoelectric elements of transmission/reception separation type and that the Young's modulus at 23°C or below of the material constituting the transmission piezoelectric element is 10 GPa to 100 GPa, and the Young's modulus at 23°C or below of the material constituting the reception piezoelectric element is 10 MPa to 1 GPa.