PRODUCTION OF SILICON THROUGH A CLOSED-LOOP PROCESS
摘要
The inventive method of producing silicon comprises reacting gaseous trichlorosilane with hydrogen to deposit silicon onto a substrate and to produce silicon tetrachloride by product, vaporizing the silicon tetrachloride by-product to form gaseous silicon tetrachloride, converting the gaseous silicon tetrachloride too finely divided silicon, forming a silicon melt by melting the finely divided silicon, and forming solid silicon from the silicon melt.
申请公布号
WO2007120871(A3)
申请公布日期
2007.12.21
申请号
WO2007US09242
申请日期
2007.04.13
申请人
CABOT CORPORATION;KUTSOVSKY, YAKOV, E.;DAVIS, SHELDON, B.