VARIABLE SLIT DEVICE, ILLUMINATING DEVICE, EXPOSURE DEVICE, EXPOSURE METHOD, AND METHOD OF MANUFACTURING DEVICE

摘要

A variable slit device (20) for producing a slit-shaped illumination light having the lengths in the longitudinal and lateral directions. The variable slit device comprises a first light-intensity distribution setting part (21) for setting a first light-intensity distribution as the light-intensity distribution along one outer edge part (21a) of the pair of outer edge parts of the slit-shaped illumination light along the longitudinal direction, a second light-intensity distribution setting part (22) for setting a second light-intensity distribution as the light-intensity distribution along the other outer edge part (22a) of the pair of outer edge parts, and selection members (23, 24) for selecting a first part of the light beam having the first light-intensity distribution and a second part of the light beam having the second light-intensity distribution.