METHOD OF MANUFACTURING SILICON NANOTUBES USING DOUGHNUT-SHAPED CATALYTIC METAL LAYER
摘要
<p>Provided is a method of manufacturing silicon nanotubes including forming non-catalytic metal islands on a substrate; forming catalyst metal doughnuts to surround the non-catalytic metal islands; and growing silicon nanotubes on the catalyst metal doughnuts. The silicon nanotubes are efficiently grown using the catalyst metal doughnuts.</p>
申请公布号
WO2007145406(A1)
申请公布日期
2007.12.21
申请号
WO2006KR05308
申请日期
2006.12.08
申请人
ELECTRONICS AND TELECOMMUNICATIONS RESEARCH INSTITUTE;PARK, RAE-MAN;KIM, SANG-HYEOB;MAENG, SUNGLYUL;PARK, JONGHYURK
发明人
PARK, RAE-MAN;KIM, SANG-HYEOB;MAENG, SUNGLYUL;PARK, JONGHYURK