| 摘要 |
A non-contact type inspection apparatus and a manufacturing method thereof are provided to simplify a configuration of the inspection apparatus by forming a sensor member using a metal plate and coupling a cable with the sensor member using a solder. A non-contact type inspection apparatus includes a sensor member(220) and a cable(230). The sensor member includes a ground portion and a signal portion. Plural holes are formed in the ground portion. The signal portion is arranged in the hole and insulated from the ground portion. The cable is soldered on one end of the sensor member, when the sensor member is preheated. The cable includes ground and signal lines which are soldered on the ground portion(221) and the signal portion(222), respectively. The sensor member includes an insulation portion(225), which is arranged between the ground portion and the signal portion.
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