发明名称 |
AN INTEGRATED CIRCUIT DEVICE HAVING BARRIER AND METHOD OF FABRICATING THE SAME |
摘要 |
An integrated circuit device includes a semiconductor die, the semiconductor die including a semiconductor substrate, driving/control circuitry disposed along a peripheral region of the semiconductor die, a MEMS device disposed within a central region of the semiconductor die, and a barrier disposed between the driving/control circuitry and the MEMS device. |
申请公布号 |
WO2007145790(A2) |
申请公布日期 |
2007.12.21 |
申请号 |
WO2007US12357 |
申请日期 |
2007.05.24 |
申请人 |
AKUSTICA, INC.;DIAMOND, BRETT, M.;ZELEZNIK, MATTHEW, A. |
发明人 |
DIAMOND, BRETT, M.;ZELEZNIK, MATTHEW, A. |
分类号 |
H01L29/82;H01L27/14;H01L29/84 |
主分类号 |
H01L29/82 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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