UNDULATION INSPECTION DEVICE, UNDUATION INSPECTING METHOD, CONTROL PROGRAM FOR UNDUATION INSPECTION DEVICE, AND RECORDING MEDIUM

摘要

An undulation inspecting device is comprised of a light irradiating means (a line illumination (2)) for irradiating light to an object for inspection, a light intensity acquiring means (an area sensor (3)) for acquiring a light intensity distribution of light reflecting from a surface of the object to which the light is irradiated, an image pickup means (a line sensor (4)) for acquiring only prescribed light from the one reflecting from the surface of the object, an adjusting means (an image processing unit (20) and an illumination driving control unit (21)) for adjusting the light irradiating means (line illumination (2)) in accordance with the light intensity distribution acquired from the light intensity acquiring means, and a judging means (a defect judgment processing unit (23)) for judging an undulation state formed on the surface of the object in accordance with the image pickup result of the image pickup means after the adjusting. Thus, the undulation inspecting device that can easily and highly accurately inspect the undulation state (thickness difference) on the surface of the object such as a large size substrate (a color filter substrate and the like) can be provided.