METHOD FOR MANUFACTURING DISPLAY SUBSTRATE

摘要

A method for fabricating a display substrate is provided to form an organic dielectric layer without forming a passivation layer by forming the organic dielectric layer after performing first washing, second washing and NH3 plasma processing. A TFT is formed on a substrate. NH3 plasma processing is performed on a substrate including the TFT. An organic dielectric layer is formed on the NH3 plasma processed substrate. A pixel electrode electrically contacting the TFT is formed on the organic dielectric layer. The forming of the TFT includes forming a gate electrode(110) on the substrate, forming a gate dielectric layer(120) on the substrate to cover the gate electrode, forming an active layer overlapping the gate electrode on the gate dielectric layer, and forming a source electrode(142) partially contacting the active layer and a drain electrode(144) separated from the source electrode at a predetermined interval and partially contacting the active layer.