发明名称 |
MICROFABRICATION USING REPLCIATED PATTERNED TOPOGRAPHY AND SELF-ASSEMBLED MONOLAYERS |
摘要 |
A method of selectively and electrolessly depositing a metal onto a substrate having a metallic patterned-nanostructure surface is disclosed. The method includes providing a tool having a patterned-nanostructure surface, the patterned-nanostructure surface having surface regions having a nanostructured surface, replicating the tool patterned-nanostructure surface onto a substrate to form a substrate patterned-nanostructure surface, disposing a metal layer on the substrate patterned-nanostructure surface to form a metallic patterned-nanostructure surface region, forming a self-assembled monolayer on the metallic patterned-nanostructure surface region, exposing the self-assembled monolayer to an electroless plating solution comprising a deposit metal, and depositing electrolessly the deposit metal selectively on the surface regions having a metallic nanostructured surface. Articles formed from this method are also disclosed. |
申请公布号 |
WO2007021527(A3) |
申请公布日期 |
2007.12.21 |
申请号 |
WO2006US29848 |
申请日期 |
2006.07.31 |
申请人 |
3M INNOVATIVE PROPERTIES COMPANY |
发明人 |
NGUYEN, KHANH P.,;FREY, MATTHEW H.,;ZHANG, HAIYAN,;ZHANG, JUN-YING, |
分类号 |
C23C28/00;C23C18/16 |
主分类号 |
C23C28/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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