| 摘要 |
A vacuum dry apparatus for manufacturing a flat display device is provided to remove solvent coated on the panel through vacuum adsorption to improve the efficiency in drying of a panel without deforming materials or structures of the substrate. A chamber, of which right, left, front, and rear portions are opened, is installed within a housing. Window opening and closing units(200) are respectively installed at right and left sides of the chamber to open and close entrances of the housing. Gate opening and closing units(300) are respectively installed at front and rear surfaces of the chamber to open and close gates of the housing. A lift up-down unit moves a buffer plate, which is installed within the chamber, upwardly and downwardly. Discharge units(400) are respectively installed at an upper surface and a lower surface of the chamber. The discharge units adsorb solvent coated on a surface of an LCD panel loaded on the buffer plate while the chamber is maintained in a vacuum state. |
