In certain embodiments, an apparatus is provided for use in removing pollutants from a gas stream. The apparatus includes a thermal reaction unit formed from a plurality of stacked porous ceramic rings. A first of the porous ceramic rings has a first coefficient of thermal expansion (CTE) and a second of the porous ceramic rings has a second CTE. Other aspects are provided.
申请公布号
WO2007053626(A3)
申请公布日期
2007.12.21
申请号
WO2006US42501
申请日期
2006.10.30
申请人
APPLIED MATERIALS, INC.
发明人
CLARK, DANIEL, O.;RAOUX, SEBASTIEN;VERMEULEN, ROBERT, M.;CRAWFORD, SHAUN, W.