发明名称 PROCESS ABATEMENT REACTOR
摘要 In certain embodiments, an apparatus is provided for use in removing pollutants from a gas stream. The apparatus includes a thermal reaction unit formed from a plurality of stacked porous ceramic rings. A first of the porous ceramic rings has a first coefficient of thermal expansion (CTE) and a second of the porous ceramic rings has a second CTE. Other aspects are provided.
申请公布号 WO2007053626(A3) 申请公布日期 2007.12.21
申请号 WO2006US42501 申请日期 2006.10.30
申请人 APPLIED MATERIALS, INC. 发明人 CLARK, DANIEL, O.;RAOUX, SEBASTIEN;VERMEULEN, ROBERT, M.;CRAWFORD, SHAUN, W.
分类号 F01N3/10;B01D53/34 主分类号 F01N3/10
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