| 摘要 |
PROBLEM TO BE SOLVED: To provide a method of correcting force of a stylus type step difference gage for measuring a surface profile, capable of compensating dependency of the force to a probe position and a dispersion of a component dimension, in the stylus type step difference gage for measuring the surface profile. SOLUTION: In this method of correcting the force of the stylus type step difference gage, the probe is provided in one end of a support body attached swingably to a fulcrum, a magnetic substance core of a displacement sensor is provided to detect a vertical directional displacement of the probe, and a magnetic substance core of a stylus pressure generator is attached to the support body to apply stylus pressure to the probe, and the surface profile of a sample captured by the probe is measured by the displacement sensor, based on a rotational motion around the fulcrum of the support body. In the method, a relation between a displacement component z of a stylus tip of the probe and the force in the stylus tip of the probe is measured preliminarily to find a relational expression so as to be programmed in a computer, the displacement component z of the stylus tip of the probe is monitored in real time when measuring the surface profile, and a change of the displacement component z of the stylus tip of the probe is compensated by controlling a current flowing in a force generating coil by the computer, using the relational expression. COPYRIGHT: (C)2008,JPO&INPIT
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