| 摘要 |
PROBLEM TO BE SOLVED: To provide a feed mechanism for a stage in which a measurement object is never displaced in changing over coarse movement of the stage to fine movement thereof and vice versa, and the stage is smoothly moved. SOLUTION: This feed mechanism for a stage includes: a frictional movement mechanism having a feed shaft 21 supported rotatably to one side of the stage and a fixed member and in parallel to the movement direction of the stage, a fine-movement handle rotating the feed shaft 21, and a plurality of rollers 74 mounted rotatably to the other side of the stage and the fixed member to make rotating axes thereof cross the feed shaft 21; and a changeover means for bringing the rollers 74 into contact with and separating them from the feed shaft 21. COPYRIGHT: (C)2008,JPO&INPIT
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