| 摘要 |
PROBLEM TO BE SOLVED: To provide a temperature measuring apparatus, a temperature measuring method, an electron microscope capable of accurately measuring the temperature of micro regions. SOLUTION: Secondary electrons and thermal electrons, emitted from a sample surface by the collision between electrons emitted from an electron gun 10 and a sample 1, are converted into photons by a scintillator 20. The number of photons is increased by a photomultiplier tube 30 and is converted into electrical signals. The electrical signals outputted from the photomultiplier tube 30 are amplified by an electrical signal amplifier 40, and a temperature converter 50 computes the temperature of the sample 1, on the basis of both the electrical signals amplified by the electrical signal amplifier 40 and a calibration curve. COPYRIGHT: (C)2008,JPO&INPIT
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