摘要 |
This invention relates to a monitoring device used as a microscope, physiochemical device, medical appliance, or the like, and prevents comparatively easily a defocus of a monitored object caused by a thermal strain of a stage unit on which the monitored object is placed. According to this invention, the stage unit includes a first stage member on which the monitoring object is placed and which is provided with a placement member that forms a monitoring surface of the monitoring object, and a second stage which includes a placement portion on which the first stage member is placed and supports the first stage member. The monitoring surface and the contact surface of the first stage member on the placement portion with the second stage member are set almost on the same horizontal plane.
|