发明名称 |
Substrate alignment apparatus |
摘要 |
A substrate processing apparatus has a substrate transport apparatus for transporting substrates, a sensor, and a control system. The processing apparatus is adapted to effect relative movement between the substrate and the sensor. The processing apparatus is further adapted to determine a position of the substrate by sensing the substrate with the sensor.
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申请公布号 |
US2007290150(A1) |
申请公布日期 |
2007.12.20 |
申请号 |
US20060453395 |
申请日期 |
2006.06.15 |
申请人 |
KRUPYSHEV ALEXANDER G;SYSSOEV SERGEI E |
发明人 |
KRUPYSHEV ALEXANDER G.;SYSSOEV SERGEI E. |
分类号 |
G01N21/86;G01V8/00 |
主分类号 |
G01N21/86 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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