| 摘要 |
<p>Equipment for fabricating a flat panel display is provided to prevent a substrate from being slid caused by frictional resistance of air by making a lift pin support the substrate flexibly when the substrate is placed on a stone surface plate. A substrate is placed on a stone surface plate(110). A plurality of lift pins(120) supports the substrate, penetrating the stone surface plate and flexibly coming in contact with the contact surface of the substrate. A lift pin plate(130) fixes the lift pin and is connected to the lower part of the plurality of lift pins. A driving part(140) moves up/down the lift pin plate and is connected to the lift pin plate. The lift pin includes a body part and a head part. The body part is connected to the lift pin plate. The head part flexibly supports the contact surface of the substrate and is coupled to the upper part of the body part.</p> |
