| 摘要 |
<p>A pellicle is provided to supply a pellicle with a reduced content of sulfuric ions, nitric ions, organic acid and so on by forming a polymer coating layer on a pellicle frame made of aluminum alloy. A pellicle(10) includes a pellicle frame(3) made of aluminum and a pellicle layer(1) tightly installed in the pellicle frame wherein a polymer coating layer is formed on the surface of the pellicle frame. The polymer coating layer can be a negative ion electrodeposition layer of thermosetting resin, having a thickness of 5-30 mum.</p> |
