发明名称 LITHOGRAPHY EQUIPMENT, AND DEVICE FABRICATION METHOD
摘要 <P>PROBLEM TO BE SOLVED: To provide a method for mutually bonding two object components which is not easily affected by adhesive application errors such as a positional error and/or a quantitative error. <P>SOLUTION: This method provides a first object component with a first surface and a second object component with a second surface, positions the first and second object components in a way that the first and second surfaces face each other and a gap is produced between the first and second surfaces, applies adhesive to at least a part of the gap and holds the first and second object components in a fixed period and with a fixed distance to ensure that the gap is substantially filled by the adhesive by means of capillary effects and/or the gravity. In addition, this method relates to how to assemble the objects, including the mutual movement of the first and second object components to shorten the distance between the first and second surfaces. <P>COPYRIGHT: (C)2008,JPO&INPIT
申请公布号 JP2007329475(A) 申请公布日期 2007.12.20
申请号 JP20070142949 申请日期 2007.05.30
申请人 ASML NETHERLANDS BV 发明人 MARTENS SIMON BERNARDUS CORNELIS MARIA;KRAMER RONALD HARM GUNTHER
分类号 H01L21/027;G03F7/20 主分类号 H01L21/027
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