| 摘要 |
PROBLEM TO BE SOLVED: To provide a dielectric element in which leak current can be suppressed sufficiently even if a dielectric layer is thin. SOLUTION: The dielectric element 10 comprises a dielectric layer 14, and a plurality of metal layers 12 and 16 touching the dielectric layer. At least one of these metal layers contains a base metal. Interfaces 18 and 20 exist between each of these metal layers and the dielectric layer. Assuming the average value of arithmetic mean roughness of these interfaces is Ram, the Ram and the thickness T of the dielectric layer satisfy the following relation: T/Ram≥1.3. COPYRIGHT: (C)2008,JPO&INPIT
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