| 摘要 |
PROBLEM TO BE SOLVED: To provide a microscope of more simple and compact constitution and having a focusing support device capable of precisely focusing without restrictions due to magnification or NA of an objective lens. SOLUTION: When the focusing support is performed, a split prism 5 is inserted to perform focusing. An image of an iris diaphragm 30 is branched into two by a declination action of the split prism 5, and is shifted so as to be imaged at symmetrical positions with a device optical axis held in between. The image of the iris diaphragm 30 branched into two is formed on the objective lens 23 via a beam splitter 22 by the imaging action of a lens 21. By vertically moving an optical system by operating an operational part of a vertical movement device, the image of a focusing pattern 15 moving in the opposite directions each other can be seen in a field of view. During the focused state when the focal position of the objective lens 23 coincides with a sample surface 24, the image of the focusing pattern 15 is seen in a coincident state. COPYRIGHT: (C)2008,JPO&INPIT
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