| 摘要 |
PROBLEM TO BE SOLVED: To enhance measurement precision, when measuring by irradiating an optical device with light. SOLUTION: The device 1 comprises a measuring part 4 for measuring DUT 10 with chips sealed in a package, and a holding head 21 conveyed to the measurement part 4 by holding DUT 10. The holding head 21 has a shell body 21A, a recess 25 having a shape corresponding to the outer shape of a light-receiving face side of DUT 10, provided on the edge face, a light-emitting device 28 fixed on the shell body 21A by spacing the recess 25, and an optical guide part 26 communicating with the recess 25 from a light-emitting face of the light-emitting device 28 formed in the shell body 21A. COPYRIGHT: (C)2008,JPO&INPIT
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