| 摘要 |
PROBLEM TO BE SOLVED: To provide a surface measuring device capable of measuring even a small surface potential, concerning a surface potential measuring device for measuring the surface potential of a measuring object. SOLUTION: This surface potential measuring device for measuring the surface potential of the measuring object has a measuring electrode provided oppositely to the measuring object, a driving part for displacing the distance between the measuring object and the measuring electrode, and a measuring part for measuring the surface potential of the measuring object based on a voltage generated in the measuring electrode. The device has a characteristic wherein the driving part has a constitution for displacing the measuring electrode by a piezo actuator. COPYRIGHT: (C)2008,JPO&INPIT
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