发明名称 PATTERN FORMING METHOD
摘要 PROBLEM TO BE SOLVED: To provide a pattern forming method which can selectively form a fine shape on a board by using a die having a fine uneven pattern shape. SOLUTION: On a board, a resist or the like is applied, and the resist on a section on which the fine shape needs to be formed is removed. At the removed section, an optical photo-sensitive resin is applied, and the fine uneven pattern is transferred. By the irradiation of an ultraviolet ray, the optical photo-sensitive resin is hardened, the die is released, and the resist is removed. Thus, the fine shape pattern is selectively formed. COPYRIGHT: (C)2008,JPO&INPIT
申请公布号 JP2007326296(A) 申请公布日期 2007.12.20
申请号 JP20060159425 申请日期 2006.06.08
申请人 MATSUSHITA ELECTRIC IND CO LTD 发明人 YOSHIDA HIDEHIRO;NAGAI HISAO;KADO HIROSHI;YAMADA YUICHIRO
分类号 B29C59/02;B81C99/00;H01L21/027 主分类号 B29C59/02
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