发明名称 Three Dimensional Six Surface Conformal Die Coating
摘要 Semiconductor die are typically manufactured as a large group of integrated circuit die imaged through photolithographic means on a semiconductor wafer or slice made of silicon. After manufacture, the silicon wafer is thinned, usually by mechanical means, and the wafer is cut, usually with a diamond saw, to singulate the individual die. The resulting individual integrated circuit has six exposed surfaces. The top surface of the die includes the circuitry images and any passivation layers that have been added to the top layer during wafer fabrication. The present invention describes a method for protecting and insulating all six surfaces of the die to reduce breakage, provide electrical insulation for these layers, and to provide physical surfaces that can be used for bonding one semiconductor die to another for the purpose of stacking die in an interconnected module or component.
申请公布号 US2007290377(A1) 申请公布日期 2007.12.20
申请号 US20070849162 申请日期 2007.08.31
申请人 VERTICAL CIRCUITS, INC. 发明人 VINDASIUS AL;ROBINSON MARC
分类号 H01L23/29;H01L21/56;H01L23/053;H01L23/31 主分类号 H01L23/29
代理机构 代理人
主权项
地址