发明名称
摘要 <p>An array of NROM flash memory cells configured to store at least two bits per four F<SUP>2</SUP>. Split vertical channels are generated along each side of adjacent pillars. A single control gate is formed over the pillars and in the trench between the pillars. The split channels can be connected by an n+ region at the bottom of the trench or the channel wrapping around the trench bottom. Each gate insulator is capable of storing a charge that is adequately separated from the other charge storage area due to the increased channel length.</p>
申请公布号 JP2007537599(A) 申请公布日期 2007.12.20
申请号 JP20070513217 申请日期 2005.05.04
申请人 发明人
分类号 H01L21/8247;G11C11/56;G11C16/04;G11C16/10;H01L21/336;H01L21/8246;H01L27/115;H01L29/788;H01L29/792 主分类号 H01L21/8247
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