FABRICATION METHOD OF VACUUM EAVAPORATION MASK FOR ORGANIC LIGHT EMISSION DISPLAY DEVICE

摘要

A manufacturing method of a deposition mask for an organic light emitting display device is provided to generate an accurate pattern without a shadow by using the deposition mask of an accurate taper shape. A manufacturing method of a deposition mask for an organic light emitting display device includes the steps of: forming a photosensitive film on a substrate(S100); patterning the photosensitive film by the liquid immersion exposure and developing of the photosensitive film(S110); forming an electroplating layer on the patterned photosensitive film(S120); and separating the electroplating layer from the substrate(S130). The photosensitive film has a taper shape in the patterning step.