DIMENSION CALIBRATION SAMPLE FOR MICROSCOPE

摘要

PROBLEM TO BE SOLVED: To provide a dimension calibration sample for a microscope which can be used in common to microscopes to mainly perform measurement of severalμm to hundredsμm. SOLUTION: The dimension calibration sample for the microscope is equipped with: a transparent substrate; a transparent or translucent first conductive film formed on the transparent substrate; and an opaque or translucent second conductive film formed on the first conductive film. A dimension calibration pattern is formed of the second conductive film, and the first conductive film is exposed at a part where the dimension calibration pattern does not exist. COPYRIGHT: (C)2008,JPO&INPIT