Scanning microscope e.g. confocal scanning microscope, for use in micro-system technology, has signal detector arranged in optical path such that radiation is formed on detector, where focusing device is connected with scanner control unit

摘要

The microscope has a light source emitting measuring radiation on an object (6). The radiation reflected by the object as reflection radiation enters in an optical path. A scanner control unit (11) controls a sliding unit (10) by control signals. A signal detector is arranged in the optical path such that the reflection radiation is formed on the detector, where a focusing device (16) is connected with the control unit. The control unit controls a signal storage unit (13) such that the series of measurement with two measuring signals is stored for a measuring point on the object.