| 摘要 |
<P>PROBLEM TO BE SOLVED: To evaluate a definition of light containing a plurality of spectrum elements having peaks in wavelengths different from each other. <P>SOLUTION: An aligner comprises: a processing unit 21 for deriving a central wavelength of exposure light based on the spectrum measured by a measuring instrument 6; and a main control system (evaluation unit) 21 for evaluating the definition of exposure light based on the central wavelength of the exposure light. The processing unit 21 derives the central wavelength of the exposure light based on the central wavelength of each of the plurality of spectrum elements contained in the spectrum measured by the measuring instrument 6. <P>COPYRIGHT: (C)2008,JPO&INPIT |
