| 摘要 |
PROBLEM TO BE SOLVED: To provide a method for producing granular semiconductors, in which a molten semiconductor material is discharged from a bottom part of a melting crucible, then the discharged molten semiconductor material is cooled and solidified while dropping it through a drop tube, and the granular semiconductors is recovered in silicone oil arranged at a lower part of the drop tube, wherein the granular semiconductors prevented from being mixed with impurities and having uniform quality can be produced, and to provide an apparatus for producing the granular semiconductors. SOLUTION: A gas feeding nozzle unit 5 is installed in the horizontal cross section of the drop tube for dropping the molten semiconductor so that the central axis of each gas-introducing nozzle downwardly forms an angleθof >0 to 60°with the horizontal cross section of the drop tube and further forms an angleϕof >0 to 45°with a line segment connecting the nozzle opening center and the center of the concentric circle. Thereby, the introduced gas proceeds spirally around the vertical central axis of the drop tube toward a recovery device, and the decomposed and evaporated matter of silicone oil is discharged to the outside of the recovery device from a discharge port by the flow of the introduced gas and the suction force of a discharge pump without flowing upward. COPYRIGHT: (C)2008,JPO&INPIT
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