发明名称 |
DEVICE FOR VACUUM PLASMA TREATMENT OF ARTICLES |
摘要 |
FIELD: vacuum plasma treatment of articles with coats. ^ SUBSTANCE: proposed device has working chamber with anode which is communicated via at least one hole with chamber provided with cathode; device is also provided with DC source. Additional chamber with additional anode is connected with additional DC source and is communicated with working chamber via at least one hole. Anode is used as holder of articles and cathode is made in form of cathode of vacuum-arc discharge. ^ EFFECT: enhanced efficiency of chemico-thermal treatment of articles. ^ 3 dwg, 2 ex |
申请公布号 |
RU2312932(C2) |
申请公布日期 |
2007.12.20 |
申请号 |
RU20030111421 |
申请日期 |
2003.04.22 |
申请人 |
NATSIONAL'NYJ NAUCHNYJ TSENTR "KHAR'KOVSKIJ FIZIKO-TEKHNICHESKIJ INSTITUT" |
发明人 |
SABLEV LEONID PAVLOVICH;SHULAEV VALERIJ MIKHAJLOVICH;ANDREEV ANATOLIJ AFANAS'EVICH |
分类号 |
C23C14/32;C23C8/06;C23C8/36 |
主分类号 |
C23C14/32 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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