摘要 |
PROBLEM TO BE SOLVED: To improve detection accuracy of a resistance type gas sensor equipped with an oxide semiconductor layer formed from an oxide containing cerium. SOLUTION: This gas sensor 10 which is the resistance type gas sensor is equipped with the oxide semiconductor layer 11 formed from the oxide containing cerium, and a detection electrode 12 for detecting a resistivity of the oxide semiconductor layer 11. The oxide semiconductor layer 11 contains an alumina-containing layer 11a containing alumina, and the detection electrode 12 is provided so as to be in contact with the alumina-containing layer 11a. COPYRIGHT: (C)2008,JPO&INPIT |