| 摘要 |
PROBLEM TO BE SOLVED: To provide an apparatus and a method of thermocompression bonding which can efficiently cool a thermocompression bonding tool. SOLUTION: A heat conductor 20 is provided so as to contact the upper part of a heater 5 for heating a pressing surface 2a provided on the lower part of the thermocompression bonding tool 2. The heat conductor 20 has a heat conduction rate higher than that of a heat insulation part 21 for insulating the conduction of heat from the heater 5 to the upper part, and has high effect of radiating heat from the heater 5. Thus, the thermocompression bonding tool 2 can be efficiently cooled and a cooling time can be shortened. COPYRIGHT: (C)2008,JPO&INPIT
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