| 摘要 |
PROBLEM TO BE SOLVED: To provide a substrate inspection unit which can decrease its production cost, and to provide a substrate inspection device and method including the unit. SOLUTION: The substrate inspection unit includes lower rollers, restriction members, a drive unit, and an inspection part. The lower rollers carry substrates contacting their bottoms. The restriction members are arranged so as to correspond to the lower rollers, and restrict the vertical motion of the substrates. The drive unit is engaged with the lower rollers, and drives them. The inspection part inspects the substrates which are carried to the inspection area by the lower rollers. Thus, the installation space is minimized, and the production cost can be decreased. COPYRIGHT: (C)2008,JPO&INPIT
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