| 摘要 |
PROBLEM TO BE SOLVED: To solve the problem wherein unstable auto-focusing is connected to a misreport or overlooking of flaws in a method for specifying the position of the flaws from the difference between a detected image and a reference image by the conventional visual inspection methods due to comparison with the detected image, and for example where a chip, immediately after folding, is subjected to comparative inspection, the difference in image is generated due to the difference in the scanning direction of the detected image and the reference image, and accurate determination of the flaws by image comparison cannot be performed. SOLUTION: An auto-focusing region is arranged in front of the scanning direction of a strip imaging region, in order to improve the above-mentioned problem and a focal position is calculated from the contrast value of the auto-focusing region and the stage height is controlled. COPYRIGHT: (C)2008,JPO&INPIT
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