发明名称 Methods and apparatus for aligning an etalon with a photodiode array
摘要 A method and apparatus are disclosed for measuring a characteristic, e.g. spectral bandwidth, of a light beam. The apparatus may comprise an etalon for generating an interference pattern having at least one light cone, an arrangement of detector elements, the arrangement receiving a portion of the light cone and producing a signal indicative of the characteristic; and an auxiliary detector positioned to receive a portion of the light cone and produce a signal indicative of an alignment between the etalon and the linear arrangement.
申请公布号 US2007291279(A1) 申请公布日期 2007.12.20
申请号 US20060452501 申请日期 2006.06.14
申请人 CYMER, INC. 发明人 RAFAC ROBERT J.
分类号 G01B11/02;G01B9/02 主分类号 G01B11/02
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