HOLDER OF THIN-FILM ARTICLE, AND HAND FOR HOLDING THIN-FILM ARTICLE

摘要

PROBLEM TO BE SOLVED: To hold thin-film articles having different diameters and to prevent damage of an edge of each of the thin-film articles when holding the thin-film articles. SOLUTION: A universal hand 1 has a sucking surface 1A capable of sucking and holding a small-diameter wafer 31 and a large-diameter wafer 32 which have a substantially circular shape. The sucking surface 1A has a recess 13 so that an edge 31A may not contact the sucking surface 1A when the small-diameter wafer 31 is sucked. COPYRIGHT: (C)2008,JPO&INPIT