| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a member for a feed pump manufacturable at low cost and having hard film with excellent corrosion resistance and adhesiveness on a surface thereof, and a method for manufacturing the same. <P>SOLUTION: An impeller 1 is provided with a roughly bell shape cylindrical part and a blade part formed around the same. Partially enlarged section part 11 near a surface of the impeller 1 is provided with metal base material 12, and amorphous film 13 formed on a surface of the base material 12 by high frequency plasma CVD method. A thickness of the amorphous film is preferably 1-50μm. Hardness thereof is preferably HV 700-2800. An arithmetic mean roughness Ra of surface of the amorphous film is preferably 0.5μm or less and ten point average roughness Rz is preferably 2.0 or less. A ratio of hydrogen atoms in the amorphous film is preferably in a range of 10-50 atom%, the rest being composed of carbon atoms. <P>COPYRIGHT: (C)2008,JPO&INPIT</p> |
