| 摘要 |
PROBLEM TO BE SOLVED: To provide a coordinate calibration method capable of efficiently calibrating the abscissas of measurement data of a surface shape measured with an interferometer, and that is easily applicable to various kinds of objects to be inspected. SOLUTION: Surface shape measurement by the use of the interferometer is performed, after integrating a light-shielding plate 2 and an object to be inspected 1 into a body, and restricting the measuring area by an edge 2a of the shielding plate 2. Moreover, the positional relation between the measuring area restricted by the shielding plate 2 and reference coordinates of a surface to be inspected 1a are specified by respective reference surfaces 1b, 1c, 2b, 2c, and relative position information of the measuring area is found separately, beforehand. The measuring area restricted by the shielding plate 2 is extracted from measurement results of the interferometer, and the abscissas of the surface shape measurement data are calibrated by the interferometer, based on the relative positional information, with respect to a reference coordinate system on the object 1. COPYRIGHT: (C)2008,JPO&INPIT
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