发明名称 |
Scanning probe microscope |
摘要 |
A scanning probe microscope has a cantilever mounted to undergo oscillation movement over a surface of a sample. The cantilever has a probe on a distal end thereof. A Z-axis controlling amount calculating mechanism calculates a controlling amount for keeping constant an oscillation amount of the cantilever. A Z-axis driving mechanism drives in a Z direction the cantilever or the sample in accordance with the controlling amount from the Z-axis controlling amount calculating mechanism. A driving range limiting device limits a driving range of the Z-axis driving mechanism. A driving range setting device optionally sets the driving range of the Z-axis driving mechanism.
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申请公布号 |
US2007290130(A1) |
申请公布日期 |
2007.12.20 |
申请号 |
US20070879878 |
申请日期 |
2007.07.19 |
申请人 |
SHIKAKURA YOSHITERU;WANTANABE KAZUTOSHI |
发明人 |
SHIKAKURA YOSHITERU;WANTANABE KAZUTOSHI |
分类号 |
G01B5/28;G01B21/30;G01Q10/02;G01Q10/04;G01Q10/06;G01Q60/24 |
主分类号 |
G01B5/28 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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