| 摘要 |
PROBLEM TO BE SOLVED: To efficiently measure the minute part on the surface of a sample by eliminating necessity for preparing many kinds of secondary targets in a fluorescent X-ray analyzer using polarized light. SOLUTION: The fluorescent X-ray analyzer is constituted of an X-ray tube bulb 1 for emitting X rays, a sample support part not shown in Fig. for supporting the sample 3 upon the reception of X rays, a polarizing filter 5 receiving the X rays emitted from the sample 3 upon the reception of X rays and a detector 4 for detecting the X rays from the polarizing filter 5. The X-ray tube bulb 1, the sample 3, the polarizing filter 5 and the detector 4 are successively arranged three light paths, that is, the light path going toward the sample 3 from the X-ray tube bulb 1, the light path going toward the polarizing filter 5 from the sample 3 and the light path going toward the detector 4 from the polarizing filter 5 become 90°mutually. COPYRIGHT: (C)2008,JPO&INPIT |
