| 摘要 |
PROBLEM TO BE SOLVED: To provide an inspection device and an inspection method for semiconductor elements which are preferred for parallel processing, and which can also reduce the inspection cost. SOLUTION: The inspection device for inspecting a plurality of semiconductor elements by using parallel processing through being connected to them, respectively, comprises a drive circuit for outputting a drive signal to the semiconductor elements; a correlated double sampling circuits for eliminating the noise of the image signals outputted from the semiconductor elements; and a serial processing circuit for converting the signals outputted from the respective correlation double sampling circuits into a single serial signal. COPYRIGHT: (C)2008,JPO&INPIT
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