发明名称 |
Method and apparatus for determining whether a sub-resolution assist feature will print |
摘要 |
One embodiment of the present invention provides a system that determines whether a sub-resolution assist feature will print. During operation, the system receives a layout which contains a sub-resolution assist feature. Next, the system determines whether the sub-resolution assist feature will print using a process model and the layout. The process model is determined using first process data and second process data. The first process data is obtained using a first layout which is exposed using a first exposure level. The second process data is obtained using a second layout which is exposed using a second exposure level, which is different from the first exposure level. The second exposure level causes the sub-resolution assist features within the second layout to print.
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申请公布号 |
US2007292777(A1) |
申请公布日期 |
2007.12.20 |
申请号 |
US20060454439 |
申请日期 |
2006.06.15 |
申请人 |
MELVIN LAWRENCE S;HUANG JENSHENG;DRAPEAU MARTIN |
发明人 |
MELVIN LAWRENCE S.;HUANG JENSHENG;DRAPEAU MARTIN |
分类号 |
G03F1/00;G03C5/00;G06F17/50;G06K9/00 |
主分类号 |
G03F1/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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