| 发明名称 |
LABEL SHEET FOR CLEANING, METHOD OF MANUFACTURING A LABEL SHEET, CONVEYING MEMBER HAVING CLEANING FUNCTION AND METHOD OF CLEANING A SUBSTRATE PROCESSING EQUIPMENT |
| 摘要 |
<p>A label sheet for cleaning is formed of a label for cleaning including a cleaning layer having a 180° peeling adhesion to a silicon wafer of 0.20 N/10 mm or less after receiving an active energy and an adhesive layer provided on one of surfaces of said cleaning layer, and a separator on which the label is removably provided through the adhesive layer.</p> |
| 申请公布号 |
EP1377394(B1) |
申请公布日期 |
2007.12.19 |
| 申请号 |
EP20010926158 |
申请日期 |
2001.05.08 |
| 申请人 |
NITTO DENKO CORPORATION |
发明人 |
NAMIKAWA, MAKOTO;TERADA, YOSHIO;NUKAGA, JIROU;TOYODA, EIJI |
| 分类号 |
B08B7/00;A47L25/00;C11D11/00;H01L21/00 |
主分类号 |
B08B7/00 |
| 代理机构 |
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代理人 |
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