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发明名称
Systems and methods for liquid immersion development
摘要
申请公布号
EP1304600(B1)
申请公布日期
2007.12.19
申请号
EP20020023408
申请日期
2002.10.18
申请人
XEROX CORPORATION
发明人
WANG, FONG-JEN J.;DOMOTO, GERALD A.;CARUTHERS, EDWARD B., JR.;VITURRO, ENRIQUE R.
分类号
G03G15/10;G03G21/14;G03G15/01
主分类号
G03G15/10
代理机构
代理人
主权项
地址
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