发明名称 6 KHz AND ABOVE GAS DISCHARGE LASER SYSTEM
摘要 <p>A high pulse repetition rate gas discharge laser system pulse power system magnetic reactor may comprise a housing comprising a core containing compartment between an inner wall of the housing, an outer wall and a bottom wall of the housing; a cooling mechanism operative to withdraw heat from the at least one of the inner wall, outer wall and bottom of the housing; at least one two magnetic cores contained within the core containing compartment; a cooling fin disposed between each of the at least two magnetic cores; and a thermal conductivity enhancement mechanism intermediate at least one of each respective cooling fin and each respective core and a respective one of the inner wall, the outer wall or the bottom wall, the thermal conductivity enhancement mechanism comprising a band comprising a plurality of torsion spring or leaf spring elements.</p>
申请公布号 EP1867015(A2) 申请公布日期 2007.12.19
申请号 EP20060748829 申请日期 2006.03.27
申请人 CYMER, INC. 发明人 UJAZDOWSKI, RICHARD C.;NESS, RICHARD M.;ALGOTS, J. MARTIN;FLEUROV, VLADIMIR B.;PALENSCHAT, FREDERICK A.;GILLESPIE, WALTER D.;MOOSMAN, BRYAN G.;STEIGER, THOMAS D.;SMITH, BRETT D.;MCKELVY, THOMAS E.
分类号 H01F27/08;H01F3/10;H01F27/22;H01F38/02;H01F38/10;H01S3/03;H01S3/036;H01S3/04;H01S3/041;H01S3/08;H01S3/22;H01S3/225;H01S3/23;H05K7/20 主分类号 H01F27/08
代理机构 代理人
主权项
地址