发明名称 |
6 KHz AND ABOVE GAS DISCHARGE LASER SYSTEM |
摘要 |
<p>A high pulse repetition rate gas discharge laser system pulse power system magnetic reactor may comprise a housing comprising a core containing compartment between an inner wall of the housing, an outer wall and a bottom wall of the housing; a cooling mechanism operative to withdraw heat from the at least one of the inner wall, outer wall and bottom of the housing; at least one two magnetic cores contained within the core containing compartment; a cooling fin disposed between each of the at least two magnetic cores; and a thermal conductivity enhancement mechanism intermediate at least one of each respective cooling fin and each respective core and a respective one of the inner wall, the outer wall or the bottom wall, the thermal conductivity enhancement mechanism comprising a band comprising a plurality of torsion spring or leaf spring elements.</p> |
申请公布号 |
EP1867015(A2) |
申请公布日期 |
2007.12.19 |
申请号 |
EP20060748829 |
申请日期 |
2006.03.27 |
申请人 |
CYMER, INC. |
发明人 |
UJAZDOWSKI, RICHARD C.;NESS, RICHARD M.;ALGOTS, J. MARTIN;FLEUROV, VLADIMIR B.;PALENSCHAT, FREDERICK A.;GILLESPIE, WALTER D.;MOOSMAN, BRYAN G.;STEIGER, THOMAS D.;SMITH, BRETT D.;MCKELVY, THOMAS E. |
分类号 |
H01F27/08;H01F3/10;H01F27/22;H01F38/02;H01F38/10;H01S3/03;H01S3/036;H01S3/04;H01S3/041;H01S3/08;H01S3/22;H01S3/225;H01S3/23;H05K7/20 |
主分类号 |
H01F27/08 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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